Einnosys

 
 

eInnoSys team has over 40 years of experience working with various SEMI standards related to GEM and SECS for both 200mm and 300mm fabs. We have helped equipment manufacturers implement various SEMI standards for their tools and integrate with their controller software. We have also worked with world class fabs in using these SEMI standards to implement factory automation.

Expertise on Platforms

  • EIGEM
  • Cimetrix
  • PeerGroup (GW)
  • Custom

SEMI standards

  • SECS/GEM standards
  • E4, E5, E30, and E37
  • GEM 300 Standards
  • E39, E40, E87, E90, E94, E116, E148, and E157
  • Interface A (EDA) standards
  • E120, E121, E125, E128, E132, E134, E138, and E147
 

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